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Maskless Lithography by using Drop-On-Demand ink jet printing method. We want to directly form P.R. pattern with very small droplets of photoresist generated by a print head array controlled by computer, then use thin film processing to transfer the pattern on wafers.

Yan Wang: U. C. Berkeley, Physics Department,
yanw@socrates.berkeley.edu

Maskless Lithography with Nanodroplets

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Maintained by Shumway.
Last updated: April 11, 2001.